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Similarity evaluation of 3D topological measurement results using statistical methods (Rising Researcher)

Citation: Vignesh Suresh, Yi Zheng, Xiao Zhang, Shaodong Wang, Hantang Qin, Qing Li, Beiwen Li, "Similarity evaluation of 3D topological measurement results using statistical methods (Rising Researcher)," Proc. SPIE 11397, Dimensional Optical Metrology and Inspection for Practical Applications IX, 113970A (21 April 2020); doi: 10.1117/12.2557627

Authors: Vignesh Suresh (Department of Mechanical Engineering, Iowa State University), Yi Zheng (Department of Mechanical Engineering, Iowa State University), Xiao Zhang (Department of Industrial and Manufacturing Systems Engineering, Iowa State University), Shaodong Wang (Department of Industrial and Manufacturing Systems Engineering, Iowa State University), Hantang Qin (Department of Industrial and Manufacturing Systems Engineering, Iowa State University), Qing Li (Department of Industrial and Manufacturing Systems Engineering, Iowa State University), Beiwen Li (Department of Mechanical Engineering, Iowa State University)

Publication Info: SPIE Defense + Commercial Sensing, 2020 (Digital Forum)

DOI: 10.1117/12.2557627